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Excimer UV equipment - List of Manufacturers, Suppliers, Companies and Products

Excimer UV equipment Product List

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Excimer UV System

Excimer UV System

Unique high-energy UV excimer laser! Utilizes the same technology as high-performance mobile displays.

With 50 years of experience in UV lasers and optical systems, our company is well-versed in the challenges of managing, shaping, and focusing excimer laser beams. Our long-lasting lasers, optics, and structures help mitigate risks, allowing for operation 24 hours a day, 365 days a year. We employ the same enabling technologies used in high-performance mobile displays. Additionally, we leverage vertical integration to design, manufacture, and assemble the entire system to meet stringent standards. **Features** - Vertical integration - Proven industrial tools - Options available for 193nm, 248nm, and 308nm systems, as well as custom 157 or 351nm options - Maximizing the use of our unique high-energy UV excimer lasers with a complete optical system configured for applications such as LTPS, LLO, LIFT, PLD, and LA-ICP-MS *For more details, please refer to the PDF document or feel free to contact us.*

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  • Laser Components

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Excimer UV device (handheld type)

Excimer UV device (handheld type)

Ultra-compact handheld excimer UV device Body weight: 3.8kg Dimensions: W320×D260×H180mm Demo unit available for loan

Ultra-compact handheld excimer UV device Main unit weight: 3.8 kg Dimensions: W320 × D260 × H180 mm Demo units available for loan 【In-house experimental machine specifications】 - Maximum experimentable size: 600 × 700 mm - Lamp intensity: 50–140 mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8 m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with contact angle meter 【Features】 - High intensity and uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Intensity adjustment possible for each lamp - Effective lamp length: up to MAX G10 size 【Main applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubrication oil curing - Resist removal and ashing

  • Coater

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High-intensity excimer UV device

High-intensity excimer UV device

Rental-only excimer UV - Long-term rental available from 15 days to over 1 year - Monthly installment payments are possible - No repair costs for the equipment will be incurred.

**Advantages of Rental** - Difficult to introduce equipment - When existing equipment breaks down - When an excimer UV device is urgently needed - Want to reduce maintenance, upkeep, property tax, and management costs - New equipment introduction possible: Please consult separately **Features** - High brightness and high uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size **Electrode-less Irradiation Unit & N2 Slit Holder Structure** The lamp structure does not have electrodes on the irradiation surface side, resulting in no obstruction of light and minimal transmission or reflection losses, making it highly efficient. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. This efficiently generates ozone and allows for uniform control of oxygen concentration with a small amount. **Main Applications** - Cleaning and surface modification of glass, films, and wafers - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant hardening - Resist removal and ashing - Cleaning of chip, film, and substrate bonding surfaces

  • Coater

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